UHV Design Linear Actuators
14 October 2024
Bellows sealed Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z).
Typical applications include positioning beamline filters and adjusting sputter sources.They can also be used for everything from deposition stages right through to production style applications.
Key Features
* 2x flange parallelism of conventional designs
* 2x load-carrying capability of conventional designs
* Smooth kinematic motion
* 10,000 cycle lifetime guarantee (3 million cycle option)
* Demountable bellows assembly
* Reliable and rigid construction
* Bakeable to 250°C
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