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Liquid Flow Controller

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Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time – able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability – delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.

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About us

TSI Instruments Ltd are worldwide industry leaders in reliable and accurate testing & measurement tools.

Our products have undergone extensive research & testing for quality tools that exceed all your expectations. We have close working relationships with research institutions around the world and a fully committed team of over 500 employees who focus entirely on quality.

Our employees are based in facilities throughout Europe, North America and Asia. Customer support is provided from sales and service offices in locations such as UK, Germany, USA, China, India & Singapore.

Our European service department based in Buckinghamshire, UK ensures that our customers' instruments are calibrated and maintained by manufacturer in market-leading turnaround time.

We offer many solutions including Aerosol & Particle Research, Air Quality Monitoring, Chemical Analysis, Cleanrooms, Filter Testing, Fluid Mechanics, Hospital, HVAC Testing & Balancing, Laboratory Control, Metals, Nanotechnology, Occupational Health & Safety, Plastics Analysis & Identification & Safety & Homeland Security.

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Aerosol Conditioning Systems
Aerosol Diluters
Aerosol Generators & Dispensers
Aerosol & Dust Monitors
Aerosol Neutralisers
Filter Testers
Elemental Analyser Libs
Continuous Monitoring Systems
Flowmeters
Fluid Mechanic Systems
Fume Hood Monitors & Controls
Impactors
Indoor Air Quality Meters/Instruments
Metal Analysers
Molecular Analysers Raman
Outdoor Environmental Enclosures
Particle Counters
Particle Sizers
Plastics Analyser
Primary Calibrators
Respirator Fit Testers
Room Pressure Monitors & Controls
Alnor
Airflow Instruments
Ventilator Test Systems
Ventilation Test Instruments
Chemlogix

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Articles/Press Releases

09/06/2022 - TSI Launches Next Generation VelociCalc® and VelociCalc® Pro Multi-Function Ventilation Meters into European Markets
TSI Incorporated is excited to announce that the new and improved 9600 VelociCalc® and VelociCalc® Pro Multi-Function Ventilation Series Meters are now available in Europe.
24/06/2021 - Rediscover the Great Indoors with the TSI AirAssure™ Indoor Air Quality Monitor
When we’re together in the same place, amazing things happen — collaboration, creativity, and innovation.
16/11/2020 - HVAC: we are the experts you can trust
Our brand and service have been synonymous with professional, high quality HVAC instruments for over 50 years.
21/10/2020 - ISO 17025 accredited test equipment from TSI Instruments
TSI and Airflow ventilation test instruments are now ISO 17025 accredited
03/06/2020 - TSI Now Offers ISO 17025 Accreditation for Select Ventilation Test Instruments
TSI Incorporated is excited to announce the addition of ISO 17025:2017 accreditation for select TSI and Airflow® ventilation test instruments.

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Company details for TSI Instruments Ltd

TSI Instruments Ltd